Scanning force microscopy and electron microscopy studies of pulsed laser deposited ZnO thin films: Application to the bulk acoustic waves (BAW) devices

Journal of Crystal Growth

Volumn 197, Issue 3, 1999, Pages 523-528

  Verardi, P ^a   Nastase, N ^b   Gherasim, C ^b   Ghica, C ^c   Dinescu, M ^d   Dinu, R ^d   Flueraru, C ^b  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^c INFM   (Romania)

^d INFPLR   (Romania)

Author keywords

Piezoelectric properties; Scanning force microscopy; Thin film; ZnO

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; CRYSTAL STRUCTURE; DEPOSITION; GRANULAR MATERIALS; LASER PULSES; PIEZOELECTRIC TRANSDUCERS; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SILICON; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ZINC OXIDE;

SCANNING FORCE MICROSCOPY;

SEMICONDUCTING FILMS;

EID: 0033514194     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00808-2     Document Type: Article

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