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Volumn 1, Issue , 1999, Pages 281-289
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ZnO thin films for high frequency SAW devices
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DOPING (ADDITIVES);
ELECTRON CYCLOTRON RESONANCE;
EPITAXIAL GROWTH;
INSERTION LOSSES;
LITHIUM COMPOUNDS;
MAGNETRON SPUTTERING;
PIEZOELECTRICITY;
TEMPERATURE;
THIN FILMS;
ZINC OXIDE;
ELECTROMECHANICAL COUPLING COEFFICIENT;
LITHIUM BORATE;
SEZAWA WAVE;
TEMPERATURE COEFFICIENT OF FREQUENCY;
ZINC OXIDE THIN FILMS;
ACOUSTIC SURFACE WAVE FILTERS;
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EID: 0033294964
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ultsym.1999.849403 Document Type: Conference Paper |
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Times cited : (29)
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References (17)
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