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Volumn 484, Issue 1-2, 2005, Pages 219-224
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Ti-O/TiN films synthesized by plasma immersion ion implantation and deposition on 316L: Study of deformation behavior and mechanical properties
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Author keywords
Mechanical properties; Nanostructures; Plasma processing and deposition; Titanium nitride; Titanium oxide
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
AUGER ELECTRON SPECTROSCOPY;
INTERFACES (MATERIALS);
ION IMPLANTATION;
NANOSTRUCTURED MATERIALS;
PLASMA APPLICATIONS;
PLASTIC DEFORMATION;
SCANNING ELECTRON MICROSCOPY;
TITANIUM NITRIDE;
TRANSMISSION ELECTRON MICROSCOPY;
ELECTRON CURRENTS;
MATRIX INTERFACES;
PLASMA IMMERSION ION IMPLANTATION;
PLASMA PROCESSING AND DEPOSITION;
THIN FILMS;
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EID: 19944396174
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2005.02.023 Document Type: Article |
Times cited : (11)
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References (20)
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