Recent advances in surface processing with metal plasma and ion beams

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 271-277

  Brown, I G ^a   Anders, A ^a   Dickinson, M R ^a   MacGill, R A ^a   Monteiro, O R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Ion implantation; Metal plasma; Plasma immersion; Thin films

Indexed keywords

BIOCOMPATIBILITY; CATALYSIS; CORROSION RESISTANCE; ELECTRIC CONDUCTIVITY OF SOLIDS; ION BEAMS; ION IMPLANTATION; ION SOURCES; PLASMA APPLICATIONS; PROTECTIVE COATINGS; THIN FILMS; VACUUM APPLICATIONS;

PLASMA IMMERSION; PLASMA TECHNOLOGY; SURFACE RESISTIVITY; VACUUM ARC DISCHARGE;

SURFACE TREATMENT;

EID: 0033077041     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00769-5     Document Type: Article

References (26)

1. See, for instance, the proceedings of the biennial conferences on Ion Beam Modification of Materials (IBMM), published in Nucl. Instrum. Methods, and on Surface Modification of Metals by Ion Beams (SMMIB), published in Surf. Coat. Technol.
2. See the proceedings of the First and Second International Workshops on Plasma-Based Ion Implantation, J. Vac. Sci. Technol. B 12 (1994) 815-998, and Surf. Coat. Technol. 85 (1996) 1-124, respectively.
3. See the proceedings of the First and Second International Workshops on Plasma-Based Ion Implantation, J. Vac. Sci. Technol. B 12 (1994) 815-998, and Surf. Coat. Technol. 85 (1996) 1-124, respectively.
4. Brown I.G., Godechot X., Yu K.M. Appl. Phys. Lett. 58:1991;1392.
5. Brown I.G., Anders A., Anders S., Dickinson M.R., Ivanov I.C., MacGill M.A., Yao X., Yu K.M. Nucl. Instrum. Methods Phys. Res. B. 80/81:1993;1281.
6. Anders A., Anders S., Brown I.G., Dickinson M.R., MacGill R.A. J. Vac. Sci. Technol. B. 12:1994;815.
7. R.L. Boxman, P. Martin, D. Sanders (Eds.), Vacuum Arc Science and Technology, Noyes, New York, 1995.
8. Anders A., Anders S., Brown I.G. Plasma Sources Sci. Technol. 4:1995;1.
9. Anders A., Anders S., Brown I. J. Appl. Phys. 75:1994;4900.
10. Brown I.G., Godechot X. IEEE Trans. Plasma Sci. 19:1991;713.
11. Brown I.G. Rev. Sci. Instrum. 65:1994;3061.
12. See, for instance, Rev. Sci. Instrum. 65 (1994) 3061-3139. This journal issue contains a review of vacuum arc ion sources and also a collection of papers on this topic by a number of authors from laboratories around the world.
13. Brown I.G. IEEE Trans. Plasma Sci. 21:1993;537.
14. Brown I.G., Anders A., Anders S., Dickinson M.R., MacGill R.A., Oks E.M. Surf. Coat. Technol. 84:1996;550.
15. Yu K.M., Katz B., Wu I.C., Brown I.G. Nucl. Instrum. Methods B. 58:1991;27.
16. Brown I.G., Anders A., Anders S., Castro R.A., Dickinson M.R., MacGill R.A., Wang Z. Nucl. Instrum. Methods B. 106:1995;646.
17. Anders S., Anders A., Brown I.G., Wei B., Komvopoulos K., Ager J.W. III, Yu K.M. Surf. Coat. Technol. 68/69:1994;388.
18. Pharr G.M., Callahan D.L., McAdams S.D., Tsui T.Y., Anders S., Anders A., Ager J.W. III, Brown I.G., Bhatia C.S., Silva S.R.P., Robertson J. Appl. Phys. Lett. 68:1996;779.
19. MacGill R.A., Anders S., Anders A., Castro R.A., Dickinson M.R., Yu K.M., Brown I.G. Surf. Coat. Technol. 78:1996;168.
20. Monteiro O.R., Wang Z., Brown I.G. J. Mat. Res. 12:1997;2401.
21. Delplancke-Ogletree M.-P., Monteiro O.R., Brown I.G. Mat. Res. Soc. Symp. Proc. 438:1997;639.
22. Chae M.S., Simnad M.T., Maple M.B., Anders S., Anders A., Brown I.G. Physica. C270:1996;173.
23. Markovic N.M., Widelov A., Ross P.N., Monteiro O.R., Brown I.G. Catal. Lett. 43:1997;161.
24. Brown I.G., Liu F., Monteiro O.R., Yu K.M., Evans P.J., Dytlewski N., Oztarhan A. Surf. Coat. Technol. 103/104:1998;293.
25. Liu F., Dickinson M.R., MacGill R.A., Anders A., Monteiro O.R., Brown I.G., Phillips L., Biallis G., Siggins T. Surf. Coat. Technol. 103/104:1998;46.
26. Ignatius M.I., Sawhney N., Gupta A., Thibadeau B., Monteiro O.R., Brown I.G. J. Biomed. Mat. Res. 40:1998;264.