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Volumn 228, Issue 1-4, 2004, Pages 34-39

Effect of crystallographic orientation upon switching properties of PZT films measured by electrostatic force microscopy

Author keywords

Atomic force microscopy; Coercive voltage; Crystallographic orientation; Electrostatic force microscopy; PZT thin films; Surface morphology

Indexed keywords

ATOMIC FORCE MICROSCOPY; COERCIVE FORCE; CRYSTALLOGRAPHY; ELECTRODES; FERROELECTRIC MATERIALS; LITHOGRAPHY; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; SURFACE CHEMISTRY; THIN FILMS; THRESHOLD VOLTAGE;

EID: 1942517862     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.12.026     Document Type: Article
Times cited : (6)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.