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Volumn 228, Issue 1-4, 2004, Pages 34-39
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Effect of crystallographic orientation upon switching properties of PZT films measured by electrostatic force microscopy
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Author keywords
Atomic force microscopy; Coercive voltage; Crystallographic orientation; Electrostatic force microscopy; PZT thin films; Surface morphology
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COERCIVE FORCE;
CRYSTALLOGRAPHY;
ELECTRODES;
FERROELECTRIC MATERIALS;
LITHOGRAPHY;
MAGNETRON SPUTTERING;
MICROELECTROMECHANICAL DEVICES;
MORPHOLOGY;
SURFACE CHEMISTRY;
THIN FILMS;
THRESHOLD VOLTAGE;
COERCIVE VOLTAGE;
CRYSTALLOGRAPHIC ORIENTATIONS;
ELECTROSTATIC FORCE MICROSCOPY (EFM);
PZT THIN FILMS;
LEAD ALLOYS;
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EID: 1942517862
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2003.12.026 Document Type: Article |
Times cited : (6)
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References (22)
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