Coupled substrate-resonator-electrostatic simulation and validation of high-q MEMS resonator performance

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 412-415

  Park, Y H ^a   Park, K C ^a  

^a UCB 450   (United States)

Author keywords

Anchor loss; Mems resonator; Q factor

Indexed keywords

COMPUTER SIMULATION; DAMPING; ELECTROSTATIC DEVICES; FOURIER TRANSFORMS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; VIBRATIONS (MECHANICAL);

ANCHOR LOSS; MEMS RESONATORS; MULTIPHYSICS MODELS; Q-FACTOR;

RESONATORS;

EID: 6344294704     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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