Micromechanical filters for miniaturized low-power communications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3673, Issue , 1999, Pages 55-66

  Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; Q FACTOR MEASUREMENT; RESONATORS; TRANSCEIVERS;

ELECTROMECHANICAL COUPLING; MICROMACHINED VIBRATING RESONATORS; SPRING COUPLED MICROMECHANICAL RESONATORS;

ELECTROMECHANICAL FILTERS;

EID: 0033349175     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)