An integrated BioMEMS fabrication technology

2001 International Semiconductor Device Research Symposium, ISDRS 2001 - Proceedings

Volumn , Issue , 2001, Pages 186-189

  Gadre, A ^a   Kastantin, M ^a   Li, Sheng ^a   Ghodssi, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BIOCOMPATIBILITY; CONDUCTING POLYMERS; FABRICATION; FLUIDIC DEVICES; MICROCHANNELS; MOLECULAR BIOLOGY; POLYDIMETHYLSILOXANE; POLYMER FILMS; POLYPYRROLES; SEMICONDUCTOR DEVICES; SILICONES;

BIOLOGICAL APPLICATIONS; ENCAPSULATION METHODS; FABRICATION PROCEDURE; FABRICATION TECHNOLOGIES; INTEGRATION APPROACH; MICRO FLUIDIC SYSTEM; MICRO-FLUIDIC DEVICES; POLYDIMETHYLSILOXANE PDMS;

MICROFLUIDICS;

EID: 84961842054     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISDRS.2001.984471     Document Type: Conference Paper

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