Depth dependence of ion implantation damage in AlxGa1-xAs/GaAs heterostructures

Journal of Applied Physics

Volumn 80, Issue 8, 1996, Pages 4366-4371

  Turkot, B A ^a   Lagow, B W ^a   Robertson, I M ^a   Forbes, D V ^a   Coleman, J J ^a   Rehn, L E ^b   Baldo, P M ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001718954     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363395     Document Type: Article

References (15)

1. A. G. Cullis, P. W. Smith, D. C. Jacobson, and J. M. Poate, J. Appl. Phys. 69, 1279 (1991).
2. D. J. Eaglesham, J. M. Poate, D. C. Jacobson, M. Cerullo, L. N. Pfeiffer, and K. West, Appl. Phys. Lett. 58, 523 (1991).
3. M. Bode, A. Ourmazd, J. A. Rentschler, M. Hong, L. C. Feldman, and J. P. Mannaerts, in Beam-Solid Interactions: Physical Phenomena, Boston, 1990 (Materials Research Society, Pittsburgh, PA, 1990), p. 197.
4. M. Bode, A. Ourmazd, J. Cunnigham, and M. Hong, Phys. Rev. Lett. 67, 843 (1991).
5. J. J. Klatt, J. Alwan, J. J. Coleman, and R. S. Averback, in Phase Formation and Modification by Beam-Solid Interactions, Boston, 1992 (Materals Research Society, Pittsburgh, PA, 1992), p. 235.
6. H. H. Tan, C. Jagadish, J. S. Williams, J. Zou, D. J. H. Cockayne, and A. Sikorski, J. Appl. Phys. 77, 87 (1995).
7. J. L. Klatt, R. S. Averback, D. V. Forbes, and J. J. Coleman, Appl. Phys. Lett. 63, 976 (1993).
8. A. G. Cullis, D. C. Jacobson, J. M. Poate, N. G. Chew, C. R. Whitehouse, and S. J. Pearton, in Advances in Meterials, Processing, and Devices in III-V Compound Semiconductors, Boston, 1989 (Materials Research Society, Pittsburgh, PA, 1989), p. 361.
9. A. G. Cullins, N. G. Chew, C. R. Whitehouse, D. C. Jacobson, J. M. Poate, and S. J. Pearton, Appl. Phys. Lett. 55, 1211 (1989).
10. L. M. Miller and J. J. Coleman, Crit. Rev. Solid State Mater. Sci. 15, 1 (1988).
11. B. A. Turkot, D. V. Forbes, I. M. Robertson, J. J. Coleman, L. E. Rehn, M. A. Kirk, and P. M. Baldo, J. Appl. Phys. 78, 97 (1995).
12. I. Jencic, M. W. Bench, I. M. Robertson, and M. A. Kirk, J. Appl. Phys. 69, 1287 (1991).
13. B. A. Turkot, I. M. Robertson, L. E. Rehn, P. Baldo, D. V. Forbes, and J. J. Coleman (unpublished).
14. M. W. Bench, D. K. Tappin, and I. M. Robertson, Philos. Mag. Lett. 66, 39 (1992).
15. J. L. Klatt (personal communication, 1993).