Space charge limited conduction and electron paramagnetic resonance studies of as grown and nitrogen incorporated tetrahedral amorphous carbon films deposited by pulsed unfiltered cathodic vacuum arc process

Diamond and Related Materials

Volumn 13, Issue 3, 2004, Pages 513-520

  Panwar, O S ^a   Gupta, S K ^a   Khan, Mohd Alim ^a   Satyanarayana, B S ^b   Bhattacharyya, R ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b Rodel Nitta Company   (Japan)

Author keywords

Cathodic vacuum arc; Density of states; Electron paramagnetic resonance; Space charge limited conduction; Spin density; Ta C films

Indexed keywords

AMORPHOUS MATERIALS; DENSITY (OPTICAL); ELECTRIC SPACE CHARGE; ELECTRONS; FILM GROWTH; HEAT CONDUCTION; NITROGEN; PARAMAGNETIC RESONANCE; SUBSTRATES;

PULSED UNFILTERED CATHODIC VACUUM ARC PROCESS; SPACE CHARGE LIMITED CONDUCTION (SCLC); TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS;

AMORPHOUS FILMS;

CARBON;

EID: 1842633370     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.12.011     Document Type: Article

References (39)

1. McKenzie D.R. Rep. Prog. Phys. 59 1996 1611
2. Lifshitz Y. Diamond Relat. Mater. 8 1999 1659
3. Grill A. Diamond Relat. Mater. 8 1999 428
4. Satyanarayana B.S. Hart A. Milne W.I. Robertson J. Appl. Phys. Lett. 71 1997 1430
5. Satyanarayana B.S. Robertson J. Milne W.I. J. Appl. Phys. 87 2000 3126
6. Tsai J.T.H. Teo K.B.K. Milne W.I. J. Vac. Sci. Technol. B 20 2002 1
7. de Heer W.A. Chatelain A. Ugarte D. Science 270 1995 1179
8. Talin A.A. Pan L.S. McCarty K.F. Felter T.E. Doerr H.J. Bunshaw R.F. Appl. Phys. Lett. 69 1996 3842
9. Jaskie J.E. MRS Bull. 21 1996 59
10. Robertson J. Mater. Sci. Eng. R 37 2002 129
11. Muilenberg G.E. Handbook of X-Ray Photoelectron Spectroscopy 1979 Perkin Elmer Corporation Minnesota, USA
12. Kleinsorge B. Ferrari A.C. Robertson J. Milne W.I. Waidmann S. Hearne S. Diamond Relat. Mater. 9 2000 643
13. Panwar O.S. Aparna Y. Shivaprasad S.M. Khan Mohd. Alim Satyanarayana B.S. Bhattacharyya R. Appl. Surf. Sci. 221 2004 392
14. McKenzie K.D. Le Comber P.G. Spear W.E. Phil. Mag. B 46 1982 377
15. Lampert M.A. Mark P. Current Injection in Solids 1970 Academic New York
16. Nespurek G.W. Sworakowski J. J. Appl. Phys. 51 1980 2098
17. Silva S.R.P. Amaratunga G.A.J. Thin Solid Films 253 1994 146
18. Veerasamy V.S. Amaratunga G.A.J. Davis C.A. Milne W.I. Hewitt P. Weiler M. Solid State Electron. 37 1994 319
19. Amaratunga G.A.J. Segal D.E. McKenzie D.R. Appl. Phys. Lett. 59 1991 69
20. Veerasamy V.S. Yuan J. Amaratunga G.A.J. Milne W.I. Gilkes K.W.R. Weiler M. Brown L.M. Phys. Rev. B 48 1993 17 954
21. Veerasamy V.S. Amaratunga G.A.J. Davis C.A. Timbs A.E. Milne W.I. McKenzie D.R. J. Phys. Condens. Matter 5 1993 L169
22. Gerstner E.G. Lukins P.B. McKenzie D.R. McCulloch D.G. Phys. Rev. B 54 1996 14 504
23. Amaratunga G.A.J. Robertson J. Veerasamy V.S. Milne W.I. Diamond Relat. Mater. 4 1995 637
24. Schwan J. Ulrich S. Roth H. Ehrhardt E. Silva S.R.P. Robertson J. Samlenski R. Brenn R. J. Appl. Phys. 79 1996 1416
25. Barklie R.C. Collins M. Cunniffe J. Silva S.R.P. Diamond Relat. Mater. 7 1998 864
26. McKenzie D.R. Muller D.A. Pailthorpe B.A. Phys. Rev. Lett. 67 1991 773
27. Anders S. Anders A. Brown I.G. Wei B. Komvopoulos K. Ager J.W.III Yu K.M. Surf. Coat. Technol. 68-69 1994 388
28. Fallon P.J. Veerasamy V.S. Davis C.A. Robertson J. Amaratunga G.A.J. Milne W.I. Koskinen J. Phys. Rev. B 48 1993 4777
29. Davis W.D. Miller H.C. J. Appl. Phys. 40 1969 2212
30. Anders A. Kulkarni A.V. MRS Symp. Proc. 675 2001 W. 11.1.1
31. Satyanarayana B.S. Hiraki A. MRS Symp. Proc. 676 2001 Y. 8.42.1
32. Satyanarayana B.S. Takahashi H. Narusawa T. Hiraki A. MRS Symp. Proc. 675 2001 W. 10.2.1
33. Silva S.R.P. Amaratunga G.A.J. Thin Solid Films 270 1995 194
34. Silva S.R.P. Rafferty B. Amaratunga G.A.J. Schwan J. Franceschini D.F. Brown L.M. Diamond Relat. Mater. 5 1996 401
35. Silva S.R.P. Robertson J. Amaratunga G.A.J. Rafferty B. Brown L.M. Schwan J. Franceschini D.F. Mariotto G. J. Appl. Phys. 81 1997 2626
36. Miller D.J. McKenzie D.R. Thin Solid Films 108 1983 257
37. Sadki A. Bounouh Y. Theye M.L. von Bardeleben J. Cernogora J. Fave J.L. Diamond Relat. Mater. 5 1996 439
38. Collins M. Barklie R.C. Anguita J.V. Carey J.D. Silva S.R.P. Diamond Relat. Mater. 9 2000 781
39. Street R.A. Hydrogenated Amorphous Silicon 1991 Cambridge University Press Cambridge