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Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 781-785

Characterization of defects in thin films of hydrogenated amorphous carbon

(5) Collins, M a Barklie, R C a Anguita, J V b Carey, J D b Silva, S R P b

a TRINITY COLLEGE DUBLIN (Ireland)

b UNIVERSITY OF SURREY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; DEFECTS; ELECTRODES; ELECTRON SPIN RESONANCE SPECTROSCOPY; FILM GROWTH; HYDROGENATION; INTERFACES (MATERIALS); NITROGEN; SILICON; SUBSTRATES; THIN FILMS;

HYDROGENATED AMORPHOUS CARBONS;

AMORPHOUS FILMS;

EID: 0033739007 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(99)00325-8 Document Type: Article

Times cited : (33)

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