XPS and XAES studies of as grown and nitrogen incorporated tetrahedral amorphous carbon films deposited by pulsed unfiltered cathodic vacuum arc process

Applied Surface Science

Volumn 221, Issue 1-4, 2004, Pages 392-401

  Panwar, O S ^a   Aparna, Y ^a   Shivaprasad, S M ^a   Khan, Mohd Alim ^a   Satyanarayana, B S ^b   Bhattacharyya, R ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b Rodel Nitta Company   (Japan)

Author keywords

Cathodic vacuum arc; Tetrahedral amorphous carbon films; XAES; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; CARBON; CATHODES; DEPOSITION; ELECTRIC POTENTIAL; FIELD EMISSION DISPLAYS; FILM GROWTH; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; NITROGEN; SENSORS; SUBSTRATES; THICKNESS MEASUREMENT; VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON CYCLOTRON WAVE RESONANCE (ECWR); X-RAY MIRRORS;

AMORPHOUS FILMS;

EID: 0345603134     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00943-7     Document Type: Article

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