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Volumn 7, Issue 6, 1998, Pages 864-868

An EPR study of defects in hydrogenated amorphous carbon thin films

Author keywords

Amorphous hydrogenated carbon; Annealing; Defect; Nitrogen

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRON SPIN RESONANCE SPECTROSCOPY; HYDROGENATION; THIN FILMS;

EID: 0032093988     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00315-4     Document Type: Article
Times cited : (28)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.