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Volumn 7, Issue 6, 1998, Pages 864-868
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An EPR study of defects in hydrogenated amorphous carbon thin films
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Author keywords
Amorphous hydrogenated carbon; Annealing; Defect; Nitrogen
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Indexed keywords
AMORPHOUS MATERIALS;
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
ELECTRON SPIN RESONANCE SPECTROSCOPY;
HYDROGENATION;
THIN FILMS;
CARBON FILMS;
CARBON;
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EID: 0032093988
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(97)00315-4 Document Type: Article |
Times cited : (28)
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References (22)
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