Combined measurement of silicon microbeams by grating interferometry and digital holography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3407, Issue , 1998, Pages 348-357

  Juptner W ^a   Kujawinska, M ^a   Osten, W ^a   Salbut, L ^a   Seebacher, S ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Digital holography; Displacement measurement; Grating interferometry; Microelements; Optical metrology

Indexed keywords

DIFFRACTION GRATINGS; FINITE ELEMENT METHOD; HOLOGRAPHY; INTERFEROMETERS; INTERFEROMETRY; OPTICAL RESOLVING POWER; SEMICONDUCTING SILICON; VECTORS;

AUTOMATED GRATING INTERFEROMETRY (AGI); DIGITAL HOLOGRAPHY (DH);

COHERENT LIGHT;

EID: 0032224937     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.323338     Document Type: Conference Paper

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