Digital holography for characterization and testing of MEMS structures

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 125-126

  Ferraro, P ^b   Coppola, G ^b   De Nicola, S ^a   Finizio, A ^a   Grilli, S ^d   Iodice, M ^b   Magro, C ^c   Pierattini, G ^a  

^a CNR   (Italy)

^b CNR   (Italy)

^c STMICROELECTRONICS   (Italy)

^d ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAPHY; MOEMS;

CHARACTERIZATION AND TESTING; DIGITAL HOLOGRAPHY; FABRICATION PROCESS; MEMS-STRUCTURE; MICROMACHINED STRUCTURES; NONCONTACT METHODS;

COMPUTER GENERATED HOLOGRAPHY;

EID: 84963746081     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031475     Document Type: Conference Paper

References (6)

1. T.Kreis, Digital holographic interferometry, Trends in Optical Non-Destructive Testing and Inspection, P.Rastogi, D.Inaudi, (Elsevier Science, Amsterdam, 2000), pp. 113-127.
2. S.Grilli, P.Ferraro, S.DeNicola, A.Finizio, G.Pierattini, R.Meucci, Opt. Exp.9, 294(2001).
3. E. Cuche, P. Marquet, and C. Depeursinge, Appl. Opt., 38, 6994-7001 (1999).
4. E.Cuche, F. Bevilacqua, and C. Depeursinge, Opt. Lett. 24, 291-293 (1999).
5. I.Yamaguchi, J Kato, S. Ohta, and J. Mizuno, Appl. Opt. 40, 6177-6186 (2001).
6. M. Madiou, Fundamental of Microfabrication, CRC Press, New York, (1997).