Studies of digital microscopic holography with applications to microstructure testing

Applied Optics

Volumn 40, Issue 28, 2001, Pages 5046-5051

  Xu, Lei ^a   Peng, Xiaoyuan ^a   Miao, Jianmin ^a   Asundi, Anand K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSTRUCTURE; OPTICAL RESOLVING POWER; OPTICAL TESTING; SILICON;

DIGITAL MICROSCOPIC HOLOGRAPHY;

HOLOGRAPHY;

EID: 0001541372     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.005046     Document Type: Article

References (17)

1. A. Umeda, “Review on the importance of measurement technique in micromachine technology,” in Microlithography and Metrology in Micromachining II, M. T. Postek and C. Friedrich, eds., Proc. SPIE 2880, 26-38 (1996).
2. G. C. Brown and R. Pryputniewicz, “Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography,” Opt. Eng. 37, 1398-1405 (1998).
3. L. A. Salbut and M. Kujawinska, “Gratingmicrointerferometer for local in-plane displacement/strain field analysis,” in International Conference on Applied Optical Metrology, P. K. Rastogi and E. Gyimesi, eds., Proc. SPIE 3407, 490-494 (1998).
4. G. K. Wernicke, O. Kruschke, N. Demoli, and H. Gruber, “Investigation of micro-opto-electro-mechanical components with a holographic microscopic interferometer,” in Nondestructive Evaluation of Materials and Composites II, S. R. Doctor, C. A. Lebowitz, and G. Y. Baaklini, eds., Proc. SPIE 3396, 238-243 (1998).
5. U. Schnars and W. Juptner, “Direct phase determination in hologram interferometry with use of digitally recorded holograms,” J. Opt. Soc. Am. A 11, 2011-2015 (1994).
6. I. Yamaguchi and T. Zhang, “Phase-shifting digital holography,” Opt. Lett. 22, 1268-1270 (1997).
7. G. Pedrini, P. Froning, H. Fessler, and H. Tiziani, “In-line digital holographic interferometry,” Appl. Opt. 37, 6262- 6269 (1998).
8. S. Lai, B. Kemper, and G. Bally, “Off-axis reconstruction of in-line holograms for twin-image elimination,” Opt. Commun. 169, 37-43 (1999).
9. O. Kruschke, G. K. Wernicke, T. Huth, N. Demoli, and H. Gruber, “Holographic interferometric microscope for complete displacement determination,” Opt. Eng. 36, 2448 -2456 (1997).
10. R. J. Pryputniewicz, “Heterodyne holography applications in studies of small components,” Opt. Eng. 24, 849 - 854 (1985).
11. E. Bonnotte, P. Delobelle, and L. Bornier, “Two interferometric methods for the mechanical characterization of thin film by bulging tests. Application to single crystal of silicon,” J. Mater. Res. 12, 2234 -2248 (1997).
12. S. Seebacher, W. Osten, and W. P. Jueptner, “Measuring shape and deformation of small objects using digital holography,” in Laser Interferometry IX: Applications, R. J. Pryputniewicz, G. M. Brown, and W. P. Jueptner, eds., Proc. SPIE 3479, 104-115 (1998).
13. G. Pedrini, Y. L. Zou, and H. T. Tiziani, “Digital double-pulsed holographic interferometry for vibration analysis,” J. Mod. Opt. 42, 367-374 (1995).
14. C. Wagner, S. Seebacher, W. Osten, and W. Juptner, “Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology,” Appl. Opt. 38, 4812-4820 (1999).
15. L. Xu, J. Miao, and A. Asundi, “Properties of digital holography based on in-line configuration,” Opt. Eng. 39, 3214-3219 (1999).
16. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996), pp. 19-22.
17. T. M. Kreis and W. P. Juptner, “Suppression of the dc term in digital holography,” Opt. Eng. 36, 2357-2360 (1997).