The determination of material parameters of microcomponents using digital holography

Optics and Lasers in Engineering

Volumn 36, Issue 2, 2001, Pages 103-126

  Seebacher, S ^a   Osten, W ^a   Baumbach, T ^a   Juptner W ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Deformation analysis; Digital holography; Holographic contouring; Holographic interferometry; Material parameters; Microsystem technology; Shape measurement

Indexed keywords

ALGORITHMS; CONTOUR MEASUREMENT; DATA REDUCTION; DEFORMATION;

DIGITAL HOLOGRAPHY;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0035423946     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00041-0     Document Type: Article

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