Secondary ion formation/survival during the initial stages of sputtering Si and SiO2 with Cs+

Surface Science

Volumn 555, Issue 1-3, 2004, Pages 193-208

  Van Der Heide, P A W ^a  

^a University of Houston   (United States)

Author keywords

Ion solid interactions; Secondary ion mass spectrometry; Surface electrical transport (surface conductivity, surface recombination, etc.); Work function measurements

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CESIUM; CHARGE TRANSFER; ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; SILICA; SPUTTERING; SURFACE PROPERTIES;

ION-SOLID INTERACTIONS; SURFACE ELECTRICAL TRANSPORT; WORK FUNCTION MEASUREMENTS;

SECONDARY ION MASS SPECTROMETRY;

EID: 1842527431     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2004.02.032     Document Type: Article

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