Heavy ion-surface interaction at low energy: Scattering of 3-300 eV Cs+, Xe+, and Ar+ from the Si surface

Surface Science

Volumn 357-358, Issue , 1996, Pages 595-601

  Yang, M C ^a   Kim, C ^a   Lee, H W ^a   Kang, H ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Atom solid scattering; Ion solid interactions; Silicon

Indexed keywords

ELECTRON ENERGY LEVELS; INERT GASES; ION BEAMS; MOLECULAR DYNAMICS; SCATTERING; SEMICONDUCTING SILICON; SIMULATION;

COLLISION ENERGIES; HYPERTHERMAL COLLISION; INCIDENT ION ENERGY; IONIC ENERGY DISTRIBUTION; KINETIC ENERGY; MASS ENERGY; NEUTRALIZATION; SCATTERING ANGLE; TRAJECTORY SIMULATION;

SURFACE PHENOMENA;

EID: 0030173153     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)00229-4     Document Type: Article

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