SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1264-1270

Ion bombardment: A means to improve the properties of TiN/AlN multilayered coatings

(2) Thobor, A a Rousselot, C a

a FEMTO ST INSTITUTE (France)

Author keywords

Elastic recovery; Interfaces; Nanohardness; Reactive sputtering; TiN AlN multilayered coatings; Types of ion bombardment

Indexed keywords

ALUMINUM NITRIDE; ION BOMBARDMENT; LIGHT POLARIZATION; MAGNETRON SPUTTERING; MICROHARDNESS; TITANIUM NITRIDE;

ELASTIC RECOVERY;

MULTILAYERS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18144435302 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00358-X Document Type: Article

Times cited : (8)

References (31)

1
- 0032154152
- Martin N. Baretti D. Rousselot C. Rauch J.-Y. Surf. Coat. Technol. 107 1998 172-182
- (1998) Surf. Coat. Technol. , vol.107 , pp. 172-182
- Martin, N.¹ Baretti, D.² Rousselot, C.³ Rauch, J.-Y.⁴

2
- 0003746634
- J.J. Cuomo, S.M. Rossnagel, & H.R. Kaufman (Eds.), Noyes Publications
- Roy R.A. Yee D.S. Cuomo J.J. Rossnagel S.M. Kaufman H.R. Handbook of Ion Beam Processing Technology 1989 Noyes Publications
- (1989) Handbook of Ion Beam Processing Technology
- Roy, R.A.¹ Yee, D.S.²

3
- 0030648393
- Shew B.-Y. Huang J.-L. Li D.-L. Thin Solid Films 293 1997 212-219
- (1997) Thin Solid Films , vol.293 , pp. 212-219
- Shew, B.-Y.¹ Huang, J.-L.² Li, D.-L.³

4
- 13844316895
- Berg S. Blom H.-O. Larsson T. Nender C. J. Vac. Sci. Technol. A 5 2 1987 202-207
- (1987) J. Vac. Sci. Technol. A , vol.5 , Issue.2 , pp. 202-207
- Berg, S.¹ Blom, H.-O.² Larsson, T.³ Nender, C.⁴

5
- 0041449511
- Hajek V. Rusnak K. Vlcek J. Martinu L. Gujrathi S.C. J. Vac. Sci. Technol. A 17 3 1999 899-908
- (1999) J. Vac. Sci. Technol. A , vol.17 , Issue.3 , pp. 899-908
- Hajek, V.¹ Rusnak, K.² Vlcek, J.³ Martinu, L.⁴ Gujrathi, S.C.⁵

6
- 0000673236
- Hainsworth S.V. Sjöström H. Page T.F. Sundgren J.-E. Mater. Res. Soc. Symp. Proc. 436 1997 275-280
- (1997) Mater. Res. Soc. Symp. Proc. , vol.436 , pp. 275-280
- Hainsworth, S.V.¹ Sjöström, H.² Page, T.F.³ Sundgren, J.-E.⁴

7
- 0033079660
- Okumiya M. Griepentrog M. Surf. Coat. Technol. 112 1999 123-128
- (1999) Surf. Coat. Technol. , vol.112 , pp. 123-128
- Okumiya, M.¹ Griepentrog, M.²

8
- 0032184141
- Hsieh J.H. Liang C. Yu C.H. Wu W. Surf. Coat. Technol. 108/109 1998 132-137
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 132-137
- Hsieh, J.H.¹ Liang, C.² Yu, C.H.³ Wu, W.⁴

9
- 0039636078
- Panjan P. Navinšek B. Cvelbar A. Zalar A. Vlcek J. Surf. Coat. Technol. 98 1998 1497-1502
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1497-1502
- Panjan, P.¹ Navinšek, B.² Cvelbar, A.³ Zalar, A.⁴ Vlcek, J.⁵

10
- 0031126867
- Bromark M. Larsson M. Hedenqvist P. Hogmark S. Surf. Coat. Technol. 90 1997 217-223
- (1997) Surf. Coat. Technol. , vol.90 , pp. 217-223
- Bromark, M.¹ Larsson, M.² Hedenqvist, P.³ Hogmark, S.⁴

11
- 0009821268
- Jensen H. Sobota J. Sorensen G. J. Vac. Sci. Technol. A 15 3 1997 941-945
- (1997) J. Vac. Sci. Technol. A , vol.15 , Issue.3 , pp. 941-945
- Jensen, H.¹ Sobota, J.² Sorensen, G.³

12
- 0032394142
- Yashar P. Barnett S.A. Rechner J. Sproul W.D. J. Vac. Sci. Technol. A 16 5 1998 2913-2918
- (1998) J. Vac. Sci. Technol. A , vol.16 , Issue.5 , pp. 2913-2918
- Yashar, P.¹ Barnett, S.A.² Rechner, J.³ Sproul, W.D.⁴

13
- 0042630540
- Thesis University of Franche-Comté
- Thobor A. Thesis 2001 University of Franche-Comté
- (2001)
- Thobor, A.¹

14
- 0034008987
- Ben Daia M. Aubert P. Labdi S. Le Paven-Thivet C. Houdy P. Bozet J.L. Surf. Coat. Technol. 125 2000 196-200
- (2000) Surf. Coat. Technol. , vol.125 , pp. 196-200
- Ben Daia, M.¹ Aubert, P.² Labdi, S.³ Le Paven-Thivet, C.⁴ Houdy, P.⁵ Bozet, J.L.⁶

15
- 0032320726
- Paven-Thivet L. Malibert C. Houdy P. Albouy P.A. Thin Solid Films 336 1998 373-376
- (1998) Thin Solid Films , vol.336 , pp. 373-376
- Paven-Thivet, L.¹ Malibert, C.² Houdy, P.³ Albouy, P.A.⁴

16
- 0020776923
- Sundgren J.-E. Johansson B.-O. Karlsson S.-E. Thin Solid Films 105 1983 353-393
- (1983) Thin Solid Films , vol.105 , pp. 353-393
- Sundgren, J.-E.¹ Johansson, B.-O.² Karlsson, S.-E.³

17
- 0042630539
- Patsalas P. Chantidis C. Logothetidis S. Surf. Coat. Technol. 125 2000 235-240
- (2000) Surf. Coat. Technol. , vol.125 , pp. 235-240
- Patsalas, P.¹ Chantidis, C.² Logothetidis, S.³

18
- 0029406317
- Pècz B. Frangis N. Logothetidis S. Alexandrou I. Barna P.B. Stoemenos J. Thin Solid Films 268 1995 57-63
- (1995) Thin Solid Films , vol.268 , pp. 57-63
- Pècz, B.¹ Frangis, N.² Logothetidis, S.³ Alexandrou, I.⁴ Barna, P.B.⁵ Stoemenos, J.⁶

19
- 0025597291
- Mawelle K.J.A. Sheward J.A. Thin Solid Films 193-194 1990 27-33
- (1990) Thin Solid Films , vol.193-194 , pp. 27-33
- Mawelle, K.J.A.¹ Sheward, J.A.²

20
- 0033909304
- Chooi H.M. Andersen O. Bange K. Thin Solid Films 358 2000 202-205
- (2000) Thin Solid Films , vol.358 , pp. 202-205
- Chooi, H.M.¹ Andersen, O.² Bange, K.³

21
- 0042630536
- Stanislav J. Sikav J. Cermak M. Thin Solid Films 191 1990 225-273
- (1990) Thin Solid Films , vol.191 , pp. 225-273
- Stanislav, J.¹ Sikav, J.² Cermak, M.³

22
- 16744365752
- Wong M.S. Lee Y.C. Surf. Coat. Technol. 120/121 1999 194-199
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 194-199
- Wong, M.S.¹ Lee, Y.C.²

23
- 0032288583
- Mišina M. Musil J. Kadlec S. Surf. Coat. Technol. 110 1998 168-172
- (1998) Surf. Coat. Technol. , vol.110 , pp. 168-172
- Mišina, M.¹ Musil, J.² Kadlec, S.³

24
- 0020475744
- Poitevin J.M. Lemperiere G. Tardy J. Thin Solid Films 97 1982 69-77
- (1982) Thin Solid Films , vol.97 , pp. 69-77
- Poitevin, J.M.¹ Lemperiere, G.² Tardy, J.³

25
- 0000967321
- Takahashi T. Masugata K. Kawai H. Kontani S. Yamamoto J. Vacuum 59 2000 777-784
- (2000) Vacuum , vol.59 , pp. 777-784
- Takahashi, T.¹ Masugata, K.² Kawai, H.³ Kontani, S.⁴ Yamamoto, J.⁵

26
- 0016083153
- Thornton J.A. J. Vac. Sci. Technol. 11 1974 666
- (1974) J. Vac. Sci. Technol. , vol.11 , pp. 666
- Thornton, J.A.¹

27
- 0029488450
- Jin P. Nakao S. Tanemura S. Maruno S. Thin Solid Films 271 1995 19-25
- (1995) Thin Solid Films , vol.271 , pp. 19-25
- Jin, P.¹ Nakao, S.² Tanemura, S.³ Maruno, S.⁴

28
- 13944274472
- McIntyre D. Greene J.-E. Håkansson G. Sundgren J.-E. Münz W.-D. J. Appl. Phys. 67 3 1990 1542-1553
- (1990) J. Appl. Phys. , vol.67 , Issue.3 , pp. 1542-1553
- McIntyre, D.¹ Greene, J.-E.² Håkansson, G.³ Sundgren, J.-E.⁴ Münz, W.-D.⁵

29
- 0023703764
- Penttinen I. Molarius J.M. Korhonen A.S. J. Vac. Sci. Technol. A 6 3 1988 2158-2161
- (1988) J. Vac. Sci. Technol. A , vol.6 , Issue.3 , pp. 2158-2161
- Penttinen, I.¹ Molarius, J.M.² Korhonen, A.S.³

30
- 0347362367
- Adjaottor A.A. Meletis E.I. Logothetidis S. Alexandrou I. Kokkou S. Surf. Coat. Technol. 76/77 1995 142-148
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 142-148
- Adjaottor, A.A.¹ Meletis, E.I.² Logothetidis, S.³ Alexandrou, I.⁴ Kokkou, S.⁵

31
- 0032663924
- Zeng X.T. Surf. Coat. Technol. 113 1999 75-79
- (1999) Surf. Coat. Technol. , vol.113 , pp. 75-79
- Zeng, X.T.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.