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Volumn 125, Issue 1-3, 2000, Pages 196-200
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Mechanical properties of Al/Al2O3 nanolaminated films: Correlation to microstructure
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Author keywords
Al Al2O3 multilayers; Nanoindentation; Tribological properties
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Indexed keywords
ALUMINA;
ALUMINUM;
DEPOSITION;
HARDNESS TESTING;
LAMINATING;
MICROSTRUCTURE;
MULTILAYERS;
NANOTECHNOLOGY;
SILICON WAFERS;
THERMAL EFFECTS;
TRIBOLOGY;
WEAR RESISTANCE;
NANOINDENTATION TESTS;
NANOLAMINATION;
PIN-ON-DISK TESTS;
PROTECTIVE COATINGS;
ALUMINUM OXIDE;
FILM;
HARDNESS;
MICROSTRUCTURE;
WEAR RESISTANCE;
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EID: 0034008987
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(99)00545-9 Document Type: Conference Paper |
Times cited : (7)
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References (8)
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