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Volumn 125, Issue 1-3, 2000, Pages 196-200

Mechanical properties of Al/Al2O3 nanolaminated films: Correlation to microstructure

Author keywords

Al Al2O3 multilayers; Nanoindentation; Tribological properties

Indexed keywords

ALUMINA; ALUMINUM; DEPOSITION; HARDNESS TESTING; LAMINATING; MICROSTRUCTURE; MULTILAYERS; NANOTECHNOLOGY; SILICON WAFERS; THERMAL EFFECTS; TRIBOLOGY; WEAR RESISTANCE;

EID: 0034008987     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00545-9     Document Type: Conference Paper
Times cited : (7)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.