Development and calibration of a sub-millimeter three-component force sensor

Sensors and Actuators, A: Physical

Volumn 65, Issue 1, 1998, Pages 89-94

  Tin, W L ^a,b   Mote Jr , C D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Calibration; Micro force sensors; Microfabrication; Strain gauges

Indexed keywords

ALUMINUM; CALIBRATION; ELASTICITY; ELECTROMAGNETIC FIELDS; STRAIN GAGES;

MICROFORCE SENSORS;

SILICON SENSORS;

EID: 0031999497     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0924-4247(97)01594-x     Document Type: Article

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