Poly-Si thin film transistors fabricated on plastic substrates

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 1, Issue , 1998, Pages 126-127

  Carey, P G ^a   Smith, P M ^a   Theiss, S D ^a   Wickboldt, P ^a   Sigmon, T W ^a   Tung, Y J ^a   King, T J ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FLAT PANEL DISPLAYS; MASKS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES; SEMICONDUCTOR DEVICE MANUFACTURE;

POLYSILICON;

THIN FILM TRANSISTORS;

EID: 0032300762     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)