A New Approach for Measuring Surface Parameters by a Capacitive Sensor

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 553-558

  Guadarrama Santana, A ^a   Garcia Valenzuela A ^a   Bruce, N C ^a   Hernandez Cordero J ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Capacitance sensors; Dielectric films; Rough surfaces

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRODES; FINITE DIFFERENCE METHOD; FOURIER TRANSFORMS; PERMITTIVITY; PERTURBATION TECHNIQUES; SENSORS; STATISTICS; SURFACE ROUGHNESS;

CAPACITANCE SENSORS; GAUSSIAN STATISTICS; ROUGH SURFACES;

DIELECTRIC FILMS;

EID: 1542303718     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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