Perturbation theory for surface-profile imaging with a capacitive probe

Applied Physics Letters

Volumn 77, Issue 13, 2000, Pages 2066-2068

  Garcia Valenzuela A ^a   Bruce, N C ^a   Kouznetsov, D ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343542289     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1312852     Document Type: Article

References (9)

1. C. Chang and W. Ko, in Sensors; A Comprehensive Survey, edited by W. Göpel, J. Hesse, and J. N. Zemel (VCH, Wienheim, 1994), Vol. 7.
2. A. García-Valenzuela, N. C. Bruce, and D. Kouznetsov, J. Phys. D: Appl. Phys. 31, 240 (1998).
3. N. C. Bruce, A. García-Valenzuela, and D. Kouznetsov, J. Phys. D: Appl. Phys. 32, 2692 (1999).
4. Y.-P. Zhao, G.-C. Wang, T.-M. Lu, G. Palasantzas, and J. Th. M. De Hosson, Phys. Rev. B 60, 9157 (1999).
5. D. B. Balagurov, A. V. Klyuchnik, and Yu. E. Lozovik, Phys. Solid State 42, 371 (2000).
6. C. C. Williams, W. P. Hough, and S. A. Rishton, Appl. Phys. Lett. 55, 203 (1989).
7. S. Watanabe, K. Hane, T. Ohye, M. Ito, and T. Goto, J. Vac. Sci. Technol. B 11, 1774 (1993).
8. Š. Lányi, J. Török, and P. Rehurek, Rev. Sci. Instrum. 65, 2258 (1994).
9. K. Goto and K. Hane, Rev. Sci. Instrum. 68, 120 (1997).