Tip-sample capacitance in capacitance microscopy of dielectric films

Journal of Applied Physics

Volumn 84, Issue 8, 1998, Pages 4043-4048

  Goto, Kazuya ^a,b   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CAPACITANCE; COMPUTER SIMULATION; CONDUCTIVE MATERIALS; ELECTROSTATICS; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; PERMITTIVITY; SILICA; SILICON WAFERS; SUBSTRATES;

CHARGE DENSITY DISTRIBUTION; SCANNING CAPACITANCE MICROSCOPY; TIP SAMPLE CAPACITANCE;

DIELECTRIC FILMS;

EID: 0032531589     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368617     Document Type: Article

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