A very accurate measurement system for multielectrode capacitive sensors

IEEE Transactions on Instrumentation and Measurement

Volumn 45, Issue 2, 1996, Pages 531-535

  Toth, Ferry N ^a   Meijer, Gerard C M ^a   Kerkvliet, Harry M M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CONTROL EQUIPMENT; ELECTRODES; MULTIPLEXING; NETWORKS (CIRCUITS); OSCILLATORS (ELECTRONIC); SENSORS;

MEASUREMENT ACCURACY; MEASUREMENT TIME; MICROCONTROLLER; MULTIELECTRODE CAPACITIVE SENSORS; REFERENCE CAPACITOR;

CAPACITANCE MEASUREMENT;

EID: 0030128180     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.492781     Document Type: Article

References (11)

1. F. N. Toth, G. C. M. Meijer, "A low-cost smart capacitive position sensor,"IEEE Trans. Instrum. Meas., vol. 41, no. 6, pp. 1041-1044, Dec. 1992.
2. M. R. Wolffenbuttel, "Surface micromachined capacitive tactile image sensor," Ph.D. Dissertation, Delft University of Technology, 1994.
3. M. H. W. Bonse, J. W. Spronck, and F. Zhu, "A new two-dimensional capacitive position transducer,"Sensors and Actuators A, vol. 41-42, pp. 29-32, 1994.
4. W. C. Heerens, "Basic principles in designing highly reliable multiterminal capacitor sensors and performance of some laboratory test models,"Sensors and Actuators A, vol. 3, pp. 137-148, 1982/1983.
5. G. W. de Jong, A. M. M. Aalsma, A. J. M. Bertels, K. van der Lingen, G. C. M. Meijer, and J. W. Spronck, "A smart capacitive absolute angular-position sensor,"Sensors and Actuators A, vol. 41-42, pp. 212-216, 1994.
6. G. C. M. Meijer, J. van Drecht, P. C. de Jong, and H. Neuteboom, "New concepts for smart signal processors and their application to PSD displacement transducers,"Sensors and Actuators A, vol. 35, pp. 23-30, 1992.
7. K. Martin, "A voltage-controlled switched-capacitor relaxation oscillator,"IEEE J. Solid-State Circuits, vol. SSC-16, no. 4, pp. 412-413, Aug. 1981.
8. J. van Drecht, "Relaxatie oscillator," Pat. Appl. 91.01076, The Netherlands, 1991.
9. F. M. L. van der Goes, "Low-cost sensor interfacing," Ph.D. thesis, Delft University of Technology, to be published, 1996.
10. A. B. Carlson, Communication Systems. New York: McGraw-Hill, 1986, ch. 12, p. 437.
11. F. N. Toth, A. J. M. Bertels, and G. C. M. Meijer, "A low-cost highly stable reference capacitor for capacitive sensor systems," in IMTC'95, Proc., Waltham, MA, Apr. 24-26, 1995, pp. 412-415.