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Surface and Coatings Technology

Volumn 183, Issue 2-3, 2004, Pages 239-246

Transmission electron microscopy of TiN and TiAlN thin films using specimens prepared by focused ion beam milling

(4) Cairney, J M a Harris, S G b Munroe, P R a Doyle, E D b

a UNIVERSITY OF NEW SOUTH WALES (Australia)

b SWINBURNE UNIVERSITY OF TECHNOLOGY (Australia)

Author keywords

Coatings; FIB; TEM; Thin films; TiAlN; TiN; XTEM

Indexed keywords

COATINGS; DEPOSITION; EVAPORATION; ION BEAMS; MICROSTRUCTURE; STEEL; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE;

COATING INTERFACE; CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY;

TITANIUM NITRIDE;

COATING;

EID: 2442591609 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.09.058 Document Type: Article

Times cited : (36)

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