Effects of annealing on luminescence of ZnO films deposited on Si substrates by RF magnetron sputtering

Plasma Science and Technology

Volumn 7, Issue 1, 2005, Pages 2665-2668

  Ning, Zhaoyuan ^a   Li, Huoquan ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

Annealing; Photoluminescence; ZnO

Indexed keywords

FLOW RATES; OXYGEN VACANCIES; RF MAGNETRON SPUTTERING; ZNO;

ANNEALING; CRYSTAL ORIENTATION; DEPOSITION; DESORPTION; FILM GROWTH; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; SILICON; THERMAL EFFECTS; ULTRAVIOLET RADIATION;

ZINC OXIDE;

EID: 14644392882     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/7/1/015     Document Type: Article

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