Band discontinuity at ultrathin SiO2/Si(001) interfaces

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 3, 2004, Pages

  Watarai, Masatoshi ^a   Nakamura, Jun ^a   Natori, Akiko ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON; SILICON DIOXIDE;

ARTICLE; CHEMICAL STRUCTURE; DENSITY FUNCTIONAL THEORY; ENERGY; QUANTUM MECHANICS; SEMICONDUCTOR; SURFACE PROPERTY; THICKNESS;

EID: 1442263735     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.035312     Document Type: Article

References (21)

1. B. Doyle, R. Arghavani, D. Barlage, S. Datta, M. Doczy, J. Kavalieros, A. Murthy, and R. Chau, Intel Technology J. 6, 42 (2002).
2. D.A. Muller, T. Sorsch, S. Moccio, F.H. Baumann, K. Evavs-Lutterodt, and G. Timp, Nature (London) 399, 758 (1999).
3. K. Takahashi, M.B. Seman, K. Hirose, and T. Hattori, Appl. Surf. Sci. 190, 56 (2002).
4. H. Ikegami, K. Ohmori, H. Ikeda, H. Iwano, S. Zaima, and Y. Yasuda, Jpn. J. Appl. Phys. 35, 1593 (1996).
5. H. Nohira, A. Omura, M. Katayama, and T. Hattori, Appl. Surf. Sci. 123/124, 547 (1998).
6. K. Hirose, H. Nohira, T. Koike, K. Sakano, and T. Hattori, Phys. Rev. B 59, 5617 (1999).
7. A.A. Demkov and O.F. Sankey, Phys. Rev. Lett. 83, 2038 (1999).
8. H. Kageshima and K. Shiraishi, Surf. Sci. 407, 133 (1998).
9. Z.H. Lu and D. Grozea, Appl. Phys. Lett. 80, 255 (2002).
10. B. Delley and E.F. Steigmeier, Appl. Phys. Lett. 67, 2370 (1995).
11. B.K. Agrawal and S. Agrawal, Appl. Phys. Lett. 77, 3039 (2000).
12. R. Buczko, S.J. Pennycoo, and S.T. Pantelides, Appl. Phys. Lett. 84, 943 (2000).
13. S.T. Pantelides, IEEE Trans. Nucl. Sci. 47, 2262 (2000).
14. Y. Tu and J. Tersoff, Thin Solid Films 400, 95 (2001).
15. J.B. Neaton, D.A. Muller, and N.W. Ashcroft, Phys. Rev. Lett. 85, 1298 (2000).
16. T. Yamasaki, C. Kaneta, T. Uchiyama, T. Uda, and K. Terakura, Phys. Rev. B 63, 115314 (2001).
17. C.G.V. de Walle and R.M. Martin, Phys. Rev. B 35, 8154 (1987).
18. J.P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. 77, 3865 (1996).
19. N. Troullier and J.L. Martins, Phys. Rev. B 43, 1993 (1991).
20. D. Vanderbilt, Phys. Rev. B 41, 7892 (1990).
21. B.R. Tuttle, Phys. Rev. B 67, 155324 (2003).