Nonlinear heat-transfer macromodeling for MEMS thermal devices

Journal of Micromechanics and Microengineering

Volumn 15, Issue 2, 2005, Pages 408-418

  Yang, Yao Joe ^a   Shen, Kuo Yeh ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; CLOSED LOOP CONTROL SYSTEMS; ENERGY TRANSFER; FINITE DIFFERENCE METHOD; HEAT CONDUCTION; HEAT TRANSFER; MATHEMATICAL MODELS; RADIATION EFFECTS; RESISTORS; SPECIFIC HEAT; TRANSIENTS;

HEAT RESISTORS; MATERIAL PROPERTIES; NONLINEAR EFFECTS; THERMAL DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 14244260519     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/2/022     Document Type: Article

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