A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM

Tribology Letters

Volumn 18, Issue 1, 2005, Pages 13-19

  Desai, A V ^a   Haque, M A ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Capacitive sensing; MEMS; Micro tribology; Nano tribology; Tribometer

Indexed keywords

EID: 14244259107     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-004-1700-z     Document Type: Article

References (25)

1. R. Kaneko S. Umemura M. Hirano Y. Andoh T. Miyamoto S. Fukui 1996 Wear 200 296 10.1016/S0043-1648(96)07292-4
2. C.M. Mate 2002 MRS Bull. 27 967
3. M. Bigelli, R. Christoph, H.E. Hintermann and O. Marti, in: Proceedings of the 20th International Conference on Metallurgical Coatings and Thin Films. Part 2 (of 2), Apr. 19-23, 1993, San Diego, CA, USA.
4. B. Bhushan, in: Presented at Reliability, Testing, and Characterization of MEMS/MOEMS II, Jan. 27-29, 2003, San Jose, CA, USA.
5. K. Komvopoulos 1996 Wear 200 305 10.1016/S0043-1648(96)07328-0
6. N.X. Randall J.L. Bozet 1997 Wear 212 18 10.1016/S0043-1648(97)00145-2
7. R.W. Carpick D.F. Ogletree M. Salmeron 1996 Appl. Phys. Lett. 70 1548 10.1063/1.118639
8. B.W. Chui T. W. Kenny H.J. Mamin B.D. Terris and R.D.,1998 Appl. Phys. Lett. 72 1388 10.1063/1.121064
9. B. Bhushan, Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, vol. 212, p. 1, 1998.
10. A.R. Burns J.E. Houston R.W. Carpick T.A. Michalske 1999 Phys. Rev. Lett. 82 1181 10.1103/PhysRevLett.82.1181
11. S.M. Pimenov, A.A. Smolin, E.D. Obraztsova, V.I. Konov, U. Bogli, A. Blatter, E.N. Loubnin, M. Maillat, A. Leijala, J. Burger and H.E. Hintermann, Applied Surface Science Proceedings of the 1994 7th International Conference on Solid Films and Surfaces, ICSFS-7, Dec. 12-16, 1994, vol. 92, p. 106, 1996.
12. J. Takadoum H.H. Bennani M. Allouard 1997 Surf. Coat. Tech. 88 232 10.1016/S0257-8972(96)02905-2
13. G.V. Dedkov 2000 Phys. Status Solidi (A) Appl. Res. 179 3 10.1002/ 1521-396X(200005)179:1<3::AID-PSSA3>3.0.CO;2-M
14. I.L. Singer H.M. Pollock 1991 Fundamentals of Friction: Macroscopic and Microscopic Processes, vol. 220. (Kluwer Academic Dordrecht)
15. C.T. Gibson G.S. Watson S. Myhra 1997 Wear 213 72 10.1016/ S0043-1648(97)00175-0
16. T. Zijlstra J.A. Heimberg E. Drift van der D.G. Loon van M. Dienwiebel L.E.M. Groot de J.W.M. Frenken 2000 Sensor. Actuat. A: Phys. 84 18 10.1016/S0924-4247(99)00283-6
17. C.T. Gibson G.S. Watson S. Myhra 1996 Nanotechnology 7 259 10.1088/ 0957-4484/7/3/014
18. M. Kageshima H. Jensenius M. Dienwiebel Y. Nakayama H. Tokumoto S.P. Jarvis T.H. Oosterkamp 2002 Appl. Surf. Sci. 188 440 10.1016/ S0169-4332(01)00975-8
19. A.R. Burns J.E. Houston R.W. Carpick T.A. Michalske 1999 Langmuir 15 2922 10.1021/la981521r
20. A.M. Homola J.N. Israelachvili M.L. Gee P.M. Mcuiggan 1989 J. Tribol. 111 675
21. W.R. Ashurst C. Yau C. Carraro R. Maboudian M.T. Dugger M.P. De Boer 2000 Interfacial Electrochemical and Transport Issues in Microelectromechanical Systems (MEMS) - I Session of American Institute of Chemical Engineers New York, NY, USA
22. W.R. Ashurst C. Yau C. Carraro R. Maboudian M.T. Dugger 2001 J. Microelectromech. Syst. 10 41 10.1109/84.911090
23. D.V Senft M.T. Dugger 1997 SPIE Austin Texas, USA
24. A. Hartschuh E.J. Sanchez X.S. Xie L. Novotny 2003 Phys. Rev. Lett. 90 095503
25. Microsensors, http://www.microsensors.com/pdf/MS3110%20Datasheet2.pdf