Fabrication of a novel scanning probe device for quantitative nanotribology

Sensors and Actuators, A: Physical

Volumn 84, Issue 1, 2000, Pages 18-24

  Zijlstra, T ^a   Heimberg, J A ^b   Van Der Drift, E ^a   Van Loon, D Glastra ^b   Dienwiebel, M ^b   De Groot, L E M ^a   Frenken, J W M ^b,c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b FOM INSTITUTE AMOLF   (Netherlands)

^c LEIDEN UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FORCE MEASUREMENT; FRICTION; MECHANICAL PROPERTIES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; THREE DIMENSIONAL; TRIBOLOGY;

DEEP DRY ETCHING; FRICTIONAL FORCE MEASUREMENT; SCANNING PROBE; TRIBOLEVER;

MICROSCOPIC EXAMINATION;

EID: 0034247316     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00283-6     Document Type: Article

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