Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging

Journal of Applied Crystallography

Volumn 38, Issue 1, 2005, Pages 91-96

  Lübbert, Daniel ^a,g   Ferrari, Claudio ^b   Mikulík, Petr ^c,d   Pernot, Petra ^c,e   Helfen, Lukas ^c,e   Verdi, Nicola ^b   Korytár, Dušan ^c,f   Baumbach, Tilo ^c  

^a DESY   (Germany)

^b CNR   (Italy)

^c FRAUNHOFER INSTITUTE FOR NON DESTRUCTIVE TESTING   (Germany)

^d MASARYK UNIVERSITY   (Czech Republic)

^e EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^f INSTITUTE OF CHEMISTRY   (Slovakia)

^g HUMBOLDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; GALLIUM;

ARTICLE; CRYSTAL; DENSITY; IMAGING; INSULATOR ELEMENT; ROCKING CURVE; SEMICONDUCTOR; TOPOGRAPHY; X RAY ANALYSIS; X RAY DIFFRACTION;

EID: 13844307319     PISSN: 00218898     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0021889804028195     Document Type: Article

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