Study of residual strains in wafer crystals by means of lattice tilt mapping

Nuovo Cimento della Societa Italiana di Fisica D - Condensed Matter, Atomic, Molecular and Chemical Physics, Biophysics

Volumn 19, Issue 2-4, 1997, Pages 165-173

  Ferrari, C ^a   Korytar, D ^a   Kumar, J ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008487699     PISSN: 03926737     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03040969     Document Type: Article

References (16)

1. HAKT M., J. Crijst. Growth, 55 (1981) 409.
2. BARNETT S. J., BROWN G. T. and TANNER B. K, Inst, Plnjs. Conf. Ser., No. 87 (1987) 615.
3. ISHIKAWA T., KITANO T. and MATSUI J., J. Appl. CnjsL, 20 (1987) 344.
4. KIKUTA S., KOHRA K. and SUGITA Y., Jpn. J. Appl. Plnjs., 5 (1966) 1047.
5. FERRARI C. and KORYTAR D., submitted to J. Appl. PHnjs.
6. [G] KNAUER A., KRAUSSLICH J., KITTNER R., STARKE R. and BäRWOLF A., Cnjst. Res. Technol, 25 (1990) 441.
7. ZAKHAROV S. N., LAPTEV S. A., KAGANEK V. M., BUBLIK V. T. and INDENBOM V. L., Phys. Status Solidi A, 131 (1992) 143.
8. SUGII S., KOIZUMI H. and KUBOTA E., J. Electron. Mater., 12 (1983) 701.
9. INDENBOM V. L. and KAGANER V. M., Phys. Status Solidi A, 118 (1990) 71.
10. INDENBOM V. L. and KAGANER V. M., Phys. Status Solidi A, 122 (1990) 97.
11. HüLL D. and BACON D. J., in Introduction to Dislocations, 3rd edition (Pergamon Press, Oxford) 1994, p. 20
12. FERRARI C. and FRANZOSI P., Inst. Phys. Conf. Ser., No. 117 (1991) 673.
13. JENICHEN B., KöLHER R. and MöHLING W., Phys. Status Solidi A, 89 (1985) 79.
14. JORDAN A. S., CARUSO R. and VON NEIDA A. R., Bell Syst. Tech. J., 59 (1980) 593
15. SCHLOSSMACHER P., RUFER H. and URBAN K, Inst. Phys., Conf. Sei:, No. 116 (1991) 337.
16. MATSUI V, Appl. Surf. Sei., 50 (1991) 1.