The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition

Surface and Coatings Technology

Volumn 193, Issue 1-3 SPEC. ISS., 2005, Pages 152-156

  Lee, H Y ^a   Lee, D K ^a   Kang, D H ^a   Lee, J J ^c   Joo, J H ^b  

^a Seoul National University   (South Korea)

^b Kunsan National University   (South Korea)

^c NONE

Author keywords

Carbon nitride; Inductively coupled plasma (ICP); Substrate self bias

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL BONDS; HARDNESS; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

BIAS VOLTAGE; SUBSTRATE BIAS; SUBSTRATE TEMPERATURE;

THIN FILMS;

CHEMICAL VAPOR DEPOSITION;

EID: 13844289195     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.134     Document Type: Article

References (20)

1. A.Y. Liu M.L. Cohen Science 245 1989 841
2. Yuki Togashi Yuko Hirohata Hino Tomoaki Vacuum 66 2002 391
3. S. Logothetidis H. Lefakis M. Gioti Carbon 36 1998 757
4. S.L. Sung C.H. Tseng F.K. Chiang X.J. Guo X.W. Liu H.C. Shih Thin Solid Films 340 1999 169
5. L.R. Shaginyan L. Jastrabik F. Fendrych Surf. Coat. Technol. 99 1998 42
6. Y.K. Yap Y. Mori S. Kida T. Aoyama T. Sasaki J. Cryst. Growth 198-199 1999 1028
7. L.P. Ma Y.S. Gu Z.J. Duan L. Yuan S.J. Pang Thin Solid Films 349 1999 10
8. O. Masumoto T. Kotaki H. Shikano K. Takemura S. Tanaka J. Electrochem. Soc. 141 1994 1361
9. L.R. Shaginyan L. Jastrabik F. Fendrych Surf. Coat. Technol. 99 1998 42
10. X.W. Liu J.H. Lin W.J. Jong H.C. Shih Thin Solid Films 409 2002 178
11. A.K.M.S Chowdhury D.C. Cameron M.A. Monclus Thin Solid films 355/356 1999 85
12. Stephen Muhl Juan Manuel Méndez Diamond Relat. Mater. 8 1999 1809
13. Junjie Li W.T. Zheng Zengsun Jin Xianyi Lu Guangrui Gu Xianxiu Mei Chuang Dong Appl. Surf. Sci. 191 2002 273
14. C. Popov M.F. Plass L.M. Zambov W. Kulisch Surf. Coat. Technol. 142-144 2001 688
15. G.-Q. Yu S.-H. Lee D.-G. Lee H.-D. Na H.-S. Park J.-J. Lee Surf. Coat. Technol. 154 2002 68
16. A.C. Ferrari S.E. Rodil J. Robertson Diamond Relat. Mater. 12 2003 905
17. J. Wei J. Appl. Phys. 92 2002 11
18. S.E. Rodil A.C. Ferrari J. Robertson W.I. Milne J. Appl. Phys. 89 2001 10
19. Joo Han Kim Yong Hwan Kim Dong Hun Choi Hong Koo Baik Thin Solid Films 289 1996 79
20. W.T. Zheng P.J. Cao J.J. Li X. Wang Z.S. Jin Surf. Coat. Technol. 173 2003 213