Scanning tunneling microscopy investigation of carbon nitride thin films grown by microwave plasma chemical vapor deposition

Thin Solid Films

Volumn 349, Issue 1, 1999, Pages 10-13

  Ma, L P ^a   Gu, Y S ^b   Duan, Z J ^b   Yuan, L ^a   Pang, S J ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; GRAPHITE; SCANNING TUNNELING MICROSCOPY; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS;

HIGHLY ORDERED PYROLYTIC GRAPHITE;

NITRIDES;

EID: 0032682185     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00061-9     Document Type: Article

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