A new technique of front-to-back alignment for MEMS

Sensor Letters

Volumn 2, Issue 1, 2004, Pages 78-81

  Pal, Preto ^a   Tuli, Suneet ^a   Chandra, Sudhir ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Front to back alignment; Mask aligner; MEMS

Indexed keywords

ALIGNMENT; MEMS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; SEMICONDUCTOR DEVICES; SILICON WAFERS;

BULK SILICON MICROMACHINING; FRONT-TO-BACK ALIGNMENT; MASK ALIGNERS; MASK ALIGNMENTS; MASK DESIGNS; MASK PLATES; MEMS STRUCTURES; MICRO-ELECTRO MECHANICAL SYSTEMS; PATTERN TRANSFERS; REFERENCE FRAMES; SEMICONDUCTOR POWER DEVICES; SHAPED PATTERNS; WAFER DIAMETERS; WAFER PROCESSING;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 13844263254     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2004.026     Document Type: Article

References (5)

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