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Journal of Applied Physics

Volumn 97, Issue 4, 2005, Pages

Study of the noise of micromechanical oscillators under quality factor enhancement via driving force control

(1) Tamayo, Javier a

a INSTITUTO DE MICROELECTRÓNICA DE MADRID (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DRIVING FORCE CONTROL; MICROCANTILEVERS; MICROMECHANICAL OSCILLATORS; NOISE AMPLIFICATION;

ACOUSTIC NOISE; ACTUATORS; AMPLIFIERS (ELECTRONIC); ENERGY DISSIPATION; FORCE CONTROL; NATURAL FREQUENCIES; OSCILLATIONS; RESONANCE;

OSCILLATORS (MECHANICAL);

EID: 13744251078 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1847729 Document Type: Article

Times cited : (72)

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