Direct photochemical lithography of gold (111) film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 8347-8348

  Lee, Myung Spon ^a   Hong, Seong Cheol ^a   Kim, Don ^a  

^a Pukyong National University   (South Korea)

Author keywords

Au (111) film; Photochemical lithography; Positive lithography; SAM

Indexed keywords

CRYSTALLINE MATERIALS; DEMODULATION; ELECTRODES; LIGHTING; LITHOGRAPHY; MONOLAYERS; PHOTOCHEMICAL REACTIONS; SELF ASSEMBLY; THICK FILMS; X RAY DIFFRACTION ANALYSIS;

AU(111) FILMS; PHOTOCHEMICAL LITHOGRAPHY; POSITIVE LITHOGRAPHY; SELF-ASSEMBLED MONOLAYERS (SAM);

GOLD;

EID: 13644276151     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.8347     Document Type: Article

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