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Volumn 5523, Issue , 2004, Pages 264-272

International innovations in optical finishing

Author keywords

Computer numerical control; Ion beams; Magnetic fluids; Optical finishing; Pitch polishing; Sub aperture lap

Indexed keywords

BRITTLE FRACTURE; CERIUM COMPOUNDS; ION BEAMS; MAGNETIC FLUIDS; SHEARING; SILICA; STABILITY; SURFACE ROUGHNESS;

EID: 13444270742     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.557274     Document Type: Conference Paper
Times cited : (19)

References (26)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.