Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication

Applied Optics

Volumn 37, Issue 22, 1998, Pages 5198-5210

  Takino, Hideo ^a   Shibata, Norio ^a   Itoh, Hiroshi ^a   Kobayashi, Teruki ^a   Tanaka, Hiroaki ^a   Ebi, Masami ^a   Yamamura, Kazuya ^b   Sano, Yasuhisa ^b   Mori, Yuzo ^b  

^a NIKON CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000927025     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.005198     Document Type: Article

References (21)

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