Combined advanced finishing and UV-laser conditioning for producing UV-damage-resistant fused silica optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4679, Issue , 2002, Pages 56-68

  Menapace, Joseph A ^a   Penetrante, Bernie ^a   Golini, Don ^b   Slomba, Al ^c   Miller, Phil E ^a   Parham, Tom ^a   Nichols, Mike ^a   Peterson, John ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b QED TECHNOLOGIES   (United States)

^c ZYGO CORPORATION   (United States)

Author keywords

Damage threshold; Etching; Magnetic fluid; Magnetorheological finishing; Polishing abrasives; Polishing layer; Subsurface damage; Surface modification; UV laser conditioning

Indexed keywords

ETCHING; FUSED SILICA; LASER OPTICS; LASER PULSES; OPTICAL MATERIALS; POLISHING; ULTRAVIOLET RADIATION;

LASER CONDITIONING;

LASER DAMAGE;

EID: 0036032068     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.461725     Document Type: Article

References (24)

1. A.K. Burnham, L. Hackel, P. Wegner, T. Parham, L. Hrubesh, B. Penetrante, P. Whitman, S. Demos, J. Menapace, M. Runkel, M. Fluss, M. Feit, M. Key, T. Biesiada' Improving 351-nm damage performance of large-aperture fused silica and DKDP optics", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
2. A.M. Rubenchik and M.D. Feit' Initiation, growth, and mitigation of UV damage in fused silica", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
3. A. Salleo, R. Chinsio, F.Y. Genin' Crack propagation in fused silica during UV and IR ns-laser illuminations", Laser Induced Damage in Optical Materials, SPIE Proc. 3578, 456-471 (1998).
4. J. Murray' Overview of the National Ignition Facility", SPIE 3492 supplement, 1-10 (1998).
5. B.M. Van Wonterghem, J.R. Murray, J.H. Campbell, S.R. Speck, C.E. Barker, I.C. Smith, B.F. Browning, W.C. Behrendt' Performance of a prototype for a large-aperture multi-pass Nd:glass laser for inertial confinement fusion", Applied Optics, 36, 4932-4952 (1997).
6. 2 laser treatment for mitigation of 3ω damage growth in fused silica", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
7. 2 laser polishing for reduction of 3ω damage initiation in fused silica", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
8. L.W. Hrubesh, M.A. Norton, W.A. Molander, E.E. Donohue, S.M. Maricle, B.M. Penetrante, R.M. Brusasco, W. Grundler, J.A. Butler, J.W. Carr, R.M. Hill, L.J. Summers, M.D. Feit, A. Rubenchik, M.H. Key, P.J. Wegner, A.K. Burnham, L.A. Hackel, and M.R. Kozlowski' Methods for mitigating surface damage growth in NIF final optics", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
9. B.M. Penetrante, J.E. Peterson, S.M. Maricle, and R.M. Brusasco' UV laser conditioning for reduction of 3ω damage initiation in fused silica", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
10. Z. Gu, P. Liang, and W. Zhang' Influence of glass surface layers on laser-induced damage threshold", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
11. P. Bouchut, P. Garrec, J. Newport, P. Gacoin, F. Bonnemason, S. Kaladgew' Technological processing of silica as seen through laser induced damage tests", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
12. M.J. Fluss, J. Plitzko, M. Wall' Initiation identification in 355-nm optics", Laser Induced Damage in Optical Materials, this proceedings, Boulder (2001).
13. 2 particles", Journal of Non-Crystalline Solids, 283, 129-136 (2001).
14. D.W. Camp, M.R. Kozlowski, L.M. Sheehan, M. Nichols, M. Dovik, R. Raether, I. Thomas' Subsurface damage and polishing compound affect at the 355-nm laser damage threshold of fused silica surfaces", Laser Induced Damage in Optical Materials, SPIE Proc. 3244, 356-364 (1997).
15. D. Golini, S. Jacobs, W. Kordonski, and P. Dumas' Precision optics fabrication using magnetorheological finishing", Advanced Materials for Optics and Precision Structures, CR67, 251-274 (1997).
16. A.B. Shorey, S.D. Jacobs, W.I. Kordonski, and R.F. Gans' Experiments and observations regarding mechanisms of glass removal in magnetorheological finishing", Applied Optics, 40, No. 1, 20-33 (2001).
17. W. Kordonski, D. Golini, P. Dumas, and S. Jacobs' Magnetorheological suspension-based finishing technology", SPIE, 3326, 527-535 (1998).
18. S.D. Jacobs, D. Golini, Y. Hsu, B.E. Puchebner, D. Strafford, W.I. Kordonski, I.V. Prokhorov, E. Fess, D. Pietrowski, and V.W. Kordonski' Magnetorheological finishing: a deterministic process for optics manufacturing", SPIE, 2576, 372-382 (1995).
19. S.D. Jacobs, F. Yang, E.M. Fess, J.B. Feingold, B.E. Gillman, W.I. Kordonski, H. Edwards, and D. Golini' Magnetorheological finishing of IR materials", SPIE, 3134, 258-269 (1997).
20. S.R. Arrasmith, I.A. Kozhinova, L.L. Greg, A.B. Shorey, H.J. Romanofsky, S.D. Jacobs, D. Golini, W.I. Kordonski, S. Hogan, and P. Dumas' Details of the polishing spot in magnetorheological finishing", SPIE, 3782, 92-100 (1999).
21. D. Golini, W.I. Kordonski, P. Dumas, and S. Hogan' Magnetorheological finishing (MRF) in commercial precision optics manufacturing", SPIE, 3782, 80-91 (1999).
22. G.A.C.M. Spierings' Review: Wet chemical etching of silicate glasses in hydrofluoric acid based solutions", Journal of Materials Science, 28, 6261-6273 (1993).
23. S. Frieders' Precision cleaning of bare fused silica optics", LLNL Draft Processing Procedure, (2001).
24. S. Schwartz, M.D. Feit, M.R. Kozlowski, and R.P. Mouser' Current 3ω large optic test procedures and data analysis for quality assurance of National Ignition Facility optics", Laser Induced Damage in Optical Materials, SPIE Proc., 3578, 314-321 (1998).