Polishing PMMA and other optical polymers with magnetorheological finishing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5180, Issue , 2003, Pages 123-134

  DeGroote, Jessica E ^a,b   Romanofsky, Henry J ^a   Kozhinova, Irina A ^a   Schoen, John M ^a   Jacobs, Stephen D ^a,b,c  

^a University of Rochester   (United States)

^b UNIVERSITY OF ROCHESTER   (United States)

^c UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Acrylic; Alumina; Cyclic olefin polymer; Figure correction; Magnetorheological finishing (MRF); Poly(methylmethacrylate); Polymer optics; Surface roughness; Thermal distortion; Zeonex; Zirconia polishing abrasive

Indexed keywords

ALUMINA; INJECTION MOLDING; MAGNETIC FLUIDS; POLYCARBONATES; POLYMETHYL METHACRYLATES; POLYOLEFINS; POLYSTYRENES; SILICA; SURFACE ROUGHNESS; TIN COMPOUNDS; TITANIUM DIOXIDE; ZIRCONIA;

CYCLIC OLEFIN POLYMER; MAGNETORHEOLOGICAL FLUID; MAGNTEORHEOLOGICAL FINISHING; OPTICAL POLYMER;

OPTICAL MATERIALS;

EID: 1842451924     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (39)

1. V. E. Sabinin and S. V. Solk, "Problems of the design and fabrication of optics from polymeric materials," J. Opt. Technol. 69, pp. 48-50 (2002).
2. J. D. Lytle, "Polymeric Optics," Ch. 34 in Handbook of Optics Vol. II, ed. M. Bass et al., McGraw-Hill, p. 34.13 (1995).
3. S. D. Jacobs, D. Golini, Y. Hsu, B. E. Puchebner, D. Strafford, Wm. I. Kordonski, I. V. Prokhorov, E. Fess, D. Pietrowski, and V. W. Kordonski., "Magnetorheological Finishing: A Deterministic Process for Optics Manufacturing," SPIE 2576: Optical Fabrication and Testing, ed. T. Kasai, pp. 372-382 (1995).
4. D. Golini, S. Jacobs, W. Kordonski, and P. Dumas, "Precision Optics Fabrication Using Magnetorheological Finishing," SPIE CR67: Advanced Materials for Optics and Precision Structures, ed. M. A. Ealey et al., pp. 251-274 (1997).
5. S. D. Jacobs "Nanodiamonds Enhance Removal in Magnetorheological Finishing," Finer Points 7, pp. 47-54 (1995).
6. S. R. Arrasmith, S. D. Jacobs, J. C. Lambropoulos, A. Maltsev, D. Golini, and W. I. Kordonski, "The Use of Magnetorheological Finishing (MRF) to Relieve Residual Stress and Subsurface Damage on Lapped Semiconductor Silicon Wafers," SPIE 4451: Optical Manufacturing and Testing IV, ed. H. P.Stahl, pp. 286-294 (2001).
7. I. A. Kozhinova, S. R. Arrasmith, J. C. Lambropoulos, S. D. Jacobs, and H. J. Romanofsky "Exploring Anisotropy in Removal Rate for Single Crystal Sapphire Using MRF," SPIE 4451: Optical Manufacturing and Testing IV, ed H. P. Stahl, pp. 277-285 (2001).
8. J. D. Zuegel, V. Bagnoud, I. A. Begishev, M. J. Guardalben, J. Keegan, J. Puth, and L. J. Waxer, "Prototype front end for a petawatt laser system using optical parametric chirped-pulse amplification", invited paper CME3, CLEO, Baltimore MD (2003).
9. D. Golini, M. DeMarco, W. Kordonski, and J. Bruning, "MRF polishes calcium fluoride to high quality," Optoelectr. World, Supplement to Laser Focus World 37, pp. S5-S7 (July 2001).
10. S. D. Jacobs, F. Yang, E. M. Fess, J. B. Feingold, B. E. Gillman, W. I. Kordonski, H. Edwards, and D. Golini "Magnetorheological Finishing of IR Materials," SPIE 3134: Optical Manufacturing and Testing II, ed. H. P. Stahl, pp. 258-269 (1997).
11. S. R. Arrasmith, I. A. Koshinova, L. L. Gregg, H. J. Romanofsky, A. B. Shorey, S. D. Jacobs, D. Golini, and W. I. Kordonski, "Details of the Polishing Spot in Magnetorheological Finishing (MRF)," SPIE 3782: Optical Manufacturing and Testing III, ed. H. P. Stahl, pp. 92-100 (1999).
12. A. B. Shorey, S. D. Jacobs, W. I. Kordonski, R. F. Gans, "Experiments and Observations Regarding the Mechanisms of Glass Removal in Magnetorheological Finishing," Appl. Opt. 40, pp. 20-33 (2001).
13. J. A. Menapace, B. Penetrante, D. Golini, A. Slomba, P. E. Miller, T. Parham, M. Nichols, and J. Peterson, "Combined advanced finishing and UV-laser conditioning for producing UV-damage resistant fused silica optics," SPIE 4679: Laser-Induced Damage in Optical Materials, pp. 56-67 (2002).
14. Data from "Specifications of Optical Grade Plastics", G-S. Plastic Optics, Inc., 408 St. Paul Street, Rochester, NY, 14605.
15. Coupons were provided by Mr. William S. Beich, G-S Plastic Optics, 408 St. Paul Street, Rochester, NY 14605.
16. Diamond turned pucks supplied by Mr. Paul Tolley, Syntec Technologies, 7100 Junction Road, Pavillion, NY 14525. Additional diamond turning of Zeonex pucks performed by Rochester Tool and Mold.
17. Extruded rod stock purchased from McMaster-Carr, New Brunswick, NJ; subsequently diamond turned by Rochester Tool and Mold, Inc., 670 Maple St., Rochester, NY 14611.
18. This work was conducted by J. DeGroote and J. Watson as an independent laboratory experiment, in partial fulfillment of the requirements for the course Optics 256: Senior Lab, in The Institute of Optics, University of Rochester, Fall 2001.
19. The permanent magnet machine was designed and fabricated for the Center for Optics Manufacturing in 1998 by Dr. I. Prokhorov and colleagues, Luikov Institute, Minsk, Belarus, It's capabilities and limitations are described in J. E. DeGroote, S. D. Jacobs, and J. M. Schoen "Experiments on Magnetorheological Finishing of Optical Polymers," in Optical Fabrication and Testing Digest (Optical Society of America, Washington, DC), pp. 6-9 (2002).
20. S. R. Arrasmith, I. A. Kozhinova, L. L. Gregg, A. B. Shorey, H. J. Romanofsky, S. D. Jacobs, D. Golini, W. I. Kordonski, S. Hogan, and P. Dumas, "Details of the polishing spot in magnetorheological finishing (MRF)", SPIE 3782: Optical Manufacturing and Testing III, ed. H. P. Stahl, pp. 92-100 (1999).
21. J. E. DeGroote, "Initial MRF Spotting Experiments on Optical Polymers", research project submitted in partial fulfillment of the requirements for Optics 443: Optical Fabrication and Testing, The Institute of Optics, University of Rochester, Spring 2002.
22. OED Technologies, Inc., 1040 University Ave., Rochester, NY 14607.
23. Zygo NewView 5000 white light optical profiler, Zygo Corp., Laurel Brook Rd., P. O. Box 448, Middlefield, CT, 06455. The instrument was set for areal mapping over 0.25mm × 0.35 mm; 20x Mirau; FDA res: high; 20 μm bipolar scan; Min/Mod: 5.
24. Zygo GPI xpHR phase shifting laser interferometer, Zygo Corp., Laurel Brook Rd., P. O. Box 448, Middlefield, CT, 06455.
25. S. D. Jacobs, S. R. Arrasmith, I. A. Kozhinova, L.L. Gregg, A. B. Shorey, H. J. Omanofsky, D. Golini, W. I. Kordonski, P. Dumas, and S. Hogan, "An Overview of Magnetorheological Finishing (MRF) for Precision Optics Manufacturing", in Proceedings of the Finishing of Advanced Ceramics and Glasses Symposium at the 101st Annual Meeting of the American Ceramic Society, pp. 185-199 (1999).
26. A. B. Shorey, S. D. Jacobs, W. I. Kordonsky, R. F. Gans, "Experiments and Observations Regarding the Mechanisms of Glass Removal in Magnetorheological Finishing," Appl. Opt. 40, pp. 20-33 (2001).
27. W. I. Kordonski and D. Golini, "Fundamentals of Magnetorheological Fluid Utilization in High Precision Finishing," J. Intel. Matls. Syst. & Struct., 10, pp. 683-689 (1999).
28. I. Kozhinova, S. Jacobs, S. Arrasmith, and L. Gregg, "Corrosion in Aqueous Cerium Oxide Magnetorheological Fluids", Technical Digest for the Optical Society of America Topical Meeting on Optical Fabrication and Testing, pp. 151-153 (2000).
29. A. B. Shorey, K. M. Kwong, K. M. Johnson, and S. D. Jacobs, "Nanoindentation hardness of particles used in magnetorheological finishing (MRF)," Appl. Opt. 39, pp. 5194-5204 (2000).
30. Technical Product Literature, Universal Photonics, 495 West John St., Hicksville, NY 11801.
31. Technical Product Literature, Salem Distributing Co., 5901 Gun Club Road, Winston-Salen, NC 27103.
32. Technical Product Literature, Buehler, 41 Waukegan Rd., Lake Bluff, Ill. 60044.
33. primary particle: homogeneously ordered, single domain, single crystal; aggregate: two or more primary particles, strongly bonded together and difficult to separate; agglomerate: ensembles of primary particles or aggregates, loosely bonded together and easily separated. Definitions taken from "Fundamentals of Particle Sizing", Tech Note (7/94) from Nanophase Technologies Corp., 453 Commerce St., Burr Ridge, Il 60521.
34. Horiba LA-900 Particle Size Analyzer, Horiba Instruments, Inc., Irvine, Ca 92714.
35. F. Cooke, N. Brown and E. Prochnow, "Annular Lapping of Precision Optical Flatware", Opt. Eng. 15, pp. 407-415 (Sept/Oct. 1976).
36. MiniTemp IR thermometer from Raytek, Inc., 1201 Shaffer Rd., Santa Cruz, CA, 95061-1820.
37. G. W. C. Kaye and T. H. Laby, Tables of Physical and Chemical Constants, p. 289, Longman, London (1986).
38. data from product literature, Zeon Corp., Tokyo, Japan
39. data from Optical Glass Catalog-1994, Schott Glass Technologies, Inc., 400 York Ave., Duryea, PA, 18642.