Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode

Applied Optics

Volumn 41, Issue 19, 2002, Pages 3971-3977

  Takino, Hideo ^a   Shibata, Norio ^a   Itoh, Hiroshi ^a   Kobayashi, Teruki ^a   Yamamura, Kazuya ^b   Sano, Yasuhisa ^b   Mori, Yuzo ^b  

^a NIKON CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MACHINING; PLASMA APPLICATIONS; SURFACE ROUGHNESS; VAPORIZATION;

PLASMA CHEMICAL VAPORIZATION MACHINING;

OPTICAL MATERIALS;

EID: 0036642132     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.003971     Document Type: Article

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