Nanotechnology, MEMS and NEMS and their applications to smart systems and devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5062, Issue 1, 2002, Pages 20-43

  Varadan, V K ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; ELECTRONIC PROPERTIES; INTEGRATED CIRCUIT MANUFACTURE; INTELLIGENT MATERIALS; INTELLIGENT STRUCTURES; LITHOGRAPHY; NANOTECHNOLOGY; OPTICAL SYSTEMS; SELF ASSEMBLY; SURFACE PROPERTIES;

INTERDIGITAL TRANSDUCERS; MICRO STEREO LITHOGRAPHY; NANOELECTROMECHANICAL SYSTEMS; SMART SYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 1342333431     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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