Control of internal stress in SMA/Si bimorph microactuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue , 2000, Pages 340-345

  Wang, Li ^a   Xu, Dong ^a   Cai, Bingchu ^a   Cheng, Xiulan ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; RESIDUAL STRESSES; SHAPE MEMORY EFFECT; SILICON; SINGLE CRYSTALS; SPUTTER DEPOSITION; THIN FILMS;

BIMORPH ACTUATORS;

MICROACTUATORS;

EID: 0034542585     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.396451     Document Type: Conference Paper

References (9)