Titanium-nickel shape-memory alloy actuated micropump

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 361-364

  Benard, W L ^a   Kahn, H ^a   Heuer, A H ^a   Huff, M A ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; HEATING; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; POLYIMIDES; SHAPE MEMORY EFFECT; THIN FILMS; TITANIUM ALLOYS; VALVES (MECHANICAL);

TITANIUM NICKEL;

PUMPS;

EID: 0030706722     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)