Low temperature crystallised Ti-rich NiTi shape memory alloy films for microactuators

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 65-69

  Seguin, J L ^a   Bendahan, M ^a   Isalgue, A ^b   Esteve Cano, V ^c   Carchano, H ^a   Torra, V ^b  

^a Fac Sci de S Jerome Serv A62   (France)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^c UNIVERSITAT JAUME I   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC RESISTANCE; INTELLIGENT MATERIALS; MAGNETRON SPUTTERING; MARTENSITIC TRANSFORMATIONS; MICROACTUATORS; MICROELECTRONIC PROCESSING; NICKEL COMPOUNDS; SHAPE MEMORY EFFECT; SUBSTRATES; TEMPERATURE MEASUREMENT; TITANIUM;

COMPATIBILITY; SHAPE MEMORY ALLOYS; SMART MATERIALS;

THIN FILMS;

EID: 0032665974     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00304-5     Document Type: Article

References (11)

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