Limitations on length scales for electrostatically induced submicrometer pillars and holes

Langmuir

Volumn 20, Issue 3, 2004, Pages 795-804

  Pease III, Leonard F ^a   Russel, William B ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS TRANSITION; LITHOGRAPHY; LUBRICATION; SELF ASSEMBLY; SILICON WAFERS; SPIN COATING; SURFACE TENSION; TEMPERATURE; VISCOSITY;

PILLAR ARRAYS; SUBMICROMETER HOLES; SUBMICROMETER PILLARS;

DIELECTRIC FILMS;

EID: 1242310538     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la035022o     Document Type: Article

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